Review of the Effect of ESD in MEMS
نویسنده
چکیده
A review is presented of the effect of electrostatic discharge (ESD) on the operation of capacitive microelectromechanical systems (MEMS) structures. Charge injected into the devices can result in failures due to air gap breakdown, stiction, dielectric breakdown and a no operation mode. The dynamic effects of leaky dielectric layers and air gap space charge are also examined.
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